%0 Journal Article
%T Aging of Oxygen-Treated Trimethylsilane Plasma-Polymerized Films Using Spectroscopic Ellipsometry
%A Taher M. El-Agez
%A David M. Wieliczka
%A Chris Moffitt
%A Sofyan A. Taya
%J Journal of Atomic, Molecular, and Optical Physics
%D 2011
%I Hindawi Publishing Corporation
%R 10.1155/2011/295304
%X Oxygen-treated trimethylsilane (TMS) plasma-polymerized films are investigated using rotating polarizer and analyzer ellipsometer. Aging process and composition of the samples are studied. Coordinated X-ray photoelectron spectroscopy (XPS) depth profiling studies on these films is presented for more detailed understanding of the aging process as well as the modeling of these films.
%U http://www.hindawi.com/journals/jamop/2011/295304/