%0 Journal Article
%T Porous NASICON-Type Li3Fe2(PO4)3 Thin Film Deposited by RF Sputtering as Cathode Material for Li-Ion Microbatteries
%A Florence Vacandio
%A Marielle Eyraud
%A Philippe Knauth
%A Thierry Djenizian
%A Vinsensia Ade Sugiawati
%J Archive of "Nanoscale Research Letters".
%D 2016
%R 10.1186/s11671-016-1574-7
%X We report the electrochemical performance of porous NASICON-type Li3Fe2(PO4)3 thin films to be used as a cathode for Li-ion microbatteries. Crystalline porous NASICON-type Li3Fe2(PO4)3 layers were obtained by radio frequency sputtering with an annealing treatment. The thin films were characterized by XRD, SEM, and electrochemical techniques. The chronoamperometry experiments showed that a discharge capacity of 88 mAhg£¿1 (23 ¦ÌAhcm£¿2) is attained for the first cycle at C/10 to reach 65 mAhg£¿1 (17 ¦ÌAhcm£¿2) after 10 cycles with a good stability over 40 cycles
%K Radio frequency sputtering
%K Li-ion microbatteries
%K NASICON-type Li3Fe2(PO4)3
%K Cathode thin film
%U https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4988962/