%0 Journal Article
%T Performance of Nano-Submicron-Stripe Pd Thin-Film Temperature Sensors
%A Fan Yang
%A Jingjing Xu
%A Shengyong Xu
%A Xiaoye Huo
%A Zhenhai Wang
%J Archive of "Nanoscale Research Letters".
%D 2016
%R 10.1186/s11671-016-1565-8
%X Dozens of small dual-beam thin-film temperature sensors with a total width down to 430 nm were fabricated and tested. The sensors were all made from 90-nm-thick Pd thin films, where the width of the narrow stripes was 70¨C100 nm and that of the wide ones was 210¨C800 nm. Two different calibration methods showed consistent and repeatable sensitivities of 0.7¨C1.2 ¦ÌV/K for the sensors, confirming that the sensitivity mainly depended on the width configuration of each sensor. By integrating arrays of such sensors on a practical testing platform using hybrid e-beam lithography and photolithography techniques, we demonstrated that these sensors were capable of detecting a weak surface temperature difference of 0.1¨C0.2 K at microscale, and they could be scaled up as built-in temperature sensors in many practical devices
%K Built-in temperature sensor
%K Submicron thermometry
%K Nanostripe
%K Sensitivity
%K Thin-film
%U https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4963350/