%0 Journal Article
%T Electrical and Optical Properties of a Transparent Conductive ITO/Ga2O3/Ag/Ga2O3 Multilayer for Ultraviolet Light-Emitting Diodes
%A Hong Wang
%A Ming Zhong
%A Quanbin Zhou
%A Siwei Liang
%A Xianhui Li
%J Archive of "Nanomaterials".
%D 2019
%R 10.3390/nano9030403
%X We fabricated an indium tin oxide (ITO)/Ga2O3/Ag/Ga2O3 multilayer as a transparent conductive electrode for ultraviolet light-emitting diodes (UV LEDs). The electrical and optical properties of the multilayer were improved by optimizing the annealing temperature of the ITO contact layer and the whole ITO/Ga2O3/Ag/Ga2O3 multilayer, and the thickness of the ITO contact layer and Ag metal layer. After optimization, the sheet resistance and transmittance of the ITO/Ga2O3/Ag/Ga2O3 multilayer was 3.43 ¦¸/sq and 86.4% at 335 nm, respectively. The ITO/Ga2O3/Ag/Ga2O3 multilayer also exhibited a good ohmic contact characteristic with a specific contact resistance of 1.45¡Á10£¿3 ¦¸¡¤cm2. These results show that the proposed ITO/Ga2O3/Ag/Ga2O3 multilayer is a promising alternative as a p-type electrode for UV LEDs
%K Ga2O3
%K transparent conductive electrode
%K UV LEDs
%K transmittance
%K sheet resistance
%U https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6473997/