%0 Journal Article %T Long Low-Loss-Litium Niobate on Insulator Waveguides with Sub-Nanometer Surface Roughness %A Jia Qi %A Jian Xu %A Jianhao Zhang %A Jintian Lin %A Junxia Zhou %A Lingling Qiao %A Min Wang %A Rongbo Wu %A Wei Chu %A Ya Cheng %A Zhifang Chai %A Zhiwei Fang %J Archive of "Nanomaterials". %D 2018 %R 10.3390/nano8110910 %K lithium niobate %K waveguide %K photonic integrated circuit %K propagation loss %K optical lithography %K chemo-mechanical polishing %U https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6265866/