%0 Journal Article
%T 二维MoS<sub>2</sub>/MoO<sub>2</sub>混合层结构的制备与表征<br>Preparation and Characterization of Two Dimensional MoS<sub>2</sub>/MoO<sub>2</sub> Mixed Structures
%A 邓加军
%A 叶晨骁
%A 黄燕峰
%A 车剑韬
%A 王文杰
%A 丁迅雷
%J Advances in Condensed Matter Physics
%P 33-40
%@ 2326-3520
%D 2019
%I Hans Publishing
%R 10.12677/CMP.2019.82005
%X 近年来，半导体性的二维过渡金属硫族化合物(2D-TMDCs)由于其在半导体工业上的潜在应用而备受青睐。本文利用化学气相沉积法(CVD)，以MoO<sub>3</sub>粉末和S粉为前驱体，制备出了六边形和四边形的MoS<sub>2</sub>/MoO<sub>2</sub>混合层结构。我们首先利用光学显微镜(OM)和扫描电镜(SEM)观测了样品，然后通过X射线光电子谱(XPS)和能量色散谱(EDS)测试对样品的成分进行了初步判定，最后通过Raman光谱确定了我们制备的样品就是MoS<sub>2</sub>/MoO<sub>2</sub>混合层结构。同时，我们通过对比实验，对混合层结构的生长机理进行了探究。<br />
In recent years, semiconducting two-dimensional transition metal dichalcogenides have been concerned for their potential applications in the semiconductor industry. In this paper, the hexagonal and rhomboic MoS<sub>2</sub>/MoO<sub>2</sub> mixed structures were prepared by chemical vapor deposition method using MoO<sub>3</sub> powder and S powder as precursors. First, the morphology of samples was observed by optical microscopy and SEM, and then the composition of samples was determined by XPS and EDS. Finally, the MoS<sub>2</sub>/MoO<sub>2</sub> mixed structures of samples we prepared was confirmed by the Raman spectra. At the same time, we tried to explore the growth mechanisms of the mixed structure by comparative experiments.<br />
%K 二维材料，化学气相沉积法，MoS<sub>2</sub>/MoO<sub>2</sub>混合层结构<br>Two-Dimensional Materials
%K CVD
%K MoS<sub>2</sub>/MoO<sub>2</sub> Mixed Structure
%U http://www.hanspub.org/journal/PaperInformation.aspx?PaperID=30346