%0 Journal Article
%T CVD Micro-diamond Coated Tool Lapping with Sapphire Wafer
%A Feng Wei
%A Lu Wenzhuang
%A Yu Yaping
%A Yang Bin
%A Zuo Dunwen
%J 南京理工大学学报
%D 2017
%R 10.16356/j.1005-1120.2017.01.081
%X Micro-diamond films were prepared on YG6 substrate by hot filament chemical vapor deposition method. An innovative micro-diamond coated tool was used to the lap sapphire wafer. The effect of load, rotating speed, and lapping time on material removal rate(MRR) and surface roughness was investigated. The results showed that the best process parameters were 3 N, 100 r/min and 15 min. The surface quality of sapphire improved significantly after lapping. The coating after lapping adhered well and did not show any peeling. The innovative micro-diamond coated tool was feasible and suitable for the lapping of the single crystal sapphire wafer.
%K micro-diamond film
%K sapphire
%K surface roughness
%K lapping
%U http://tnuaa.nuaa.edu.cn/ch/reader/view_abstract.aspx?file_no=20170112&flag=1