%0 Journal Article %T A Piezoelectric Friction-Inertial Linear Motor Based on Piezoelectric Single-Crystal Cymbal Displacement Amplification Mechanism %A Xing Xiaohong %A Guo Mingsen %A Chen Jialin %J 南京理工大学学报 %D 2017 %R 10.16356/j.1005-1120.2017.01.055 %X Piezoelectric friction-inertial motor is known for its promise for a long-range and high-resolution motion. The movement of the slider/rotor of the motor is achieved by stick-slip effect. We report a relaxor-based-ferroelectric-single-crystal cymbal actuator and a miniature piezoelectric friction-inertial linear motor (abbreviated as PFILM) fabricated with the cymbal actuator. The cymbal actuator is fabricated with a 10 mm diameter disk of 0.70Pb(Mg1/3Nb2/3)O3-0.30PbTiO3 single crystal. The displacement of the cymbal actuator increases almost proportionally from 0 to 23 μm with driving voltage up to 500 V, and the minimal hysteresis is observed. The cymbal-PFILM with 20 mm motion range works under driving voltage frequency of ca. 100 Hz to ca. 5 kHz, the fastest speed is obtained with 3.5 kHz and the no-load speed is 14 mm/s and the maximum thrust force is 98 mN. Compared with a PFILM based on multilayer piezoelectric ceramic, the proposed motor has a larger stroke under DC/quasistatic input voltage in fine motion mode, but a smaller driving force in long-travel mode due to lower resonance frequency. %K piezoelectric single crystal %K piezoelectric ceramic %K cymbal displacement amplification mechanism %K friction-inertial motor %U http://tnuaa.nuaa.edu.cn/ch/reader/view_abstract.aspx?file_no=20170109&flag=1