%0 Journal Article
%T 氮化镓MOCVD感应加热装置的优化设计<br>Optimization Design of GaN-MOCVD Induction Heating Device
%A 徐龙权
%A 刘新卫
%A 唐子涵
%A 方颂
%J 机械科学与技术
%D 2017
%X 为了设计一款成本低、效率高的中频感应加热器样机，利用ANSYS软件对感应加热立式氮化镓MOCVD反应室建立2D模型。首先分别通过改变加热线圈与石墨基座下表面距离及线圈之间的间距，研究分析其改变对石墨盘表面温度均匀性分布的影响，热-电耦合分析结果表明减小线圈和石墨之间的垂直距离及线圈之间的距离可以提高加热效率，并根据仿真结果对感应加热器的结构进行优化设计，确定加热效果较好的加热器结构。结合仿真与分析结果，制作出一台感应加热器样机。实验验证可知，石墨盘表面温度浮动在0.2%，温度分布均匀性较好，符合工艺的要求，满足生产条件。<br>Purpose of this paper is to design a low cost, high efficiency medium frequency induction heater. The 2D model of the vertical GaN-MOCVD reactor with induction heating was performed by the finite element method. The structural analysis of the copper coils on temperature uniformity on the surface of graphite was researched; then thermal-electromagnetic coupling analysis reveals that lessening the change can increase efficiency of heat conduction. The structural design of the induction heater is optimized based on the analysis results,and the prototype of heater is designed and fabricated. Finally, it verifies temperature distribution on the surface of graphite floating in 0.2% by experiments and the uniform temperature distribution is good, meeting the production requirement
%K 感应加热
%K MOCVD
%K ANSYS
%K 热-电耦合
%K 优化设计&lt
%K br&gt
%K heat conduction
%K finite element method
%K temperature distribution
%K optimization
%K experiments
%K model
%K structural analysis
%K structural design
%U http://journals.nwpu.edu.cn/jxkxyjs/CN/abstract/abstract6897.shtml