%0 Journal Article
%T 基于干扰观测器的磁悬浮系统精确反馈线性化<br>Precise feedback linearization in EMS systems based on a disturbance observer
%A 姜文雪
%A 周凯
%J 清华大学学报（自然科学版）
%D 2015
%R 10.16511/j.cnki.qhdxxb.2015.22.016
%X 磁悬浮系统是开环不稳定的强非线性系统。 为了提高机床磁悬浮系统的悬浮精度, 该文结合反馈线性化方法和干扰观测器补偿对磁悬浮系统进行精确线性化。对磁悬浮系统反馈线性化误差进行了分析, 建立了磁悬浮系统反馈线性化误差模型。设计了干扰观测器, 并分析了干扰观测器对反馈线性化误差的补偿作用, 最后进行了实验研究。研究表明: 干扰观测器能够有效补偿反馈线性化误差, 获得精确线性化模型。实验结果表明:磁悬浮进给系统的磁悬浮工作台实现了精确线性化, 工作台悬浮精度大幅度提高, 达到μm级精度。<br>Abstract：Electromagnetic suspension (EMS) systems are unstable open-loop, strongly nonlinear systems. The suspension accuracy of EMS systems for machine tools is improved by integrating the feedback linearization method with a disturbance observer (DOB) to precisely linearize the EMS system. The feedback linearization error is analyzed and modeled in this paper. The DOB is then designed to compensate for the feedback linearization error. This study indicates that the DOB effectively compensates for the feedback linearization error to give precise linearization of EMS systems. Tests illustrate that the EMS feed system gives precise linearization and the platform suspension accuracy is greatly improved to micron scale accuracy.
%K 机床
%K 磁悬浮
%K 反馈线性化
%K 干扰观测器
%K &lt
%K br&gt
%K machine tool
%K electromagnetic suspension
%K feedback linearization
%K disturbance observer
%U http://jst.tsinghuajournals.com/CN/Y2015/V55/I10/1067