%0 Journal Article
%T 扫描干涉光刻机相位锁定系统设计<br>Design of phase locking system for an interference lithography scanner
%A 王磊杰
%A 张鸣
%A 朱煜
%A 鲁森
%A 杨开明
%J 清华大学学报（自然科学版）
%D 2015
%X 针对扫描干涉光刻机干涉图形相位锁定需求, 提出并设计了干涉图形相位锁定系统。该系统采用零差相位干涉仪实现干涉图形相位漂移的高速高精测量, 采用声光调制器以高速高精移频的方式进行干涉图形相位调制, 并通过闭环反馈控制实现相位锁定。实验结果显示: 系统闭环控制可实现±1/25个干涉图形周期的锁定精度, 系统具有良好的相位锁定性能。该系统具有光路短、易于装调、激光利用率高等优点, 未来用于扫描干涉光刻机更具优势。<br>Abstract：An interference image phase locking system is built for an interference lithography scanner. This system has a feedback control system and uses the homodyne interference method for fast, accurate phase drift measurement and an acousto-optic modulator to accurately shift the phase of the interference image. Tests show that the system has ±1/25 interference image period accuracy when the system uses closed-loop control, which illustrates that this phase locking system has good locking performance. In addition, the system has a short optical path, is easy to assemble and adjust, and has a high laser utilization ratio, so the system is suitable for high-speed interference lithography scanners.
%K 扫描干涉光刻机
%K 相位锁定
%K 零差相位干涉仪
%K 声光调制器
%K &lt
%K br&gt
%K interference lithography scanner
%K phase locking
%K homodyne phase interferometer
%K acousto-optic modulator
%U http://jst.tsinghuajournals.com/CN/Y2015/V55/I7/722