%0 Journal Article
%T 在非黏性流体域中微悬臂梁振动的建模与仿真
%A 马树军
%A 玄航
%A 孙嘉蔚
%A 杨磊
%J 东北大学学报（自然科学版）
%D 2018
%R 10.12068/j.issn.1005-3026.2018.09.012
%X 摘要 借用欧拉-伯努利梁理论推导并计算出微悬臂梁在真空中的共振频率，根据非黏性理论经典模型分别计算出微悬臂梁在不同密度的流体中的共振频率.然后在有限元软件ANSYS(16.0)仿真环境下，采用solid45-fluid30和shell63-fluid30两种单元组合建立微悬臂梁在流体域中的三维模型并进行模态分析.最后将仿真结果与相关研究者已发表的实验与理论数据进行对比，在此基础上通过实验来验证新型有限元模型的正确性.通过有限元和实验的方法进一步验证了非黏性流体的密度是影响微悬臂梁共振频率变化的主要因素.</br>Abstract：Based on the Euler-Bernoulli beam theory， the resonant frequency of micro-cantilever in vacuum was derived and calculated， then the resonant frequency of micro-cantilever in fluids with different density was calculated according to the classical non-viscous theoretical model. In the finite element software ANSYS (16.0) simulation environment， the solid45-fluid30 and shell63-fluid30 units were used to establish a three-dimensional model of micro-cantilever in the fluid domain and modal analysis was also performed. Finally， the simulation results were compared with the experimental and theoretical data reported by other researchers. Besides， experiments were done to verify the correctness of the finite element model. The theory that density of inviscid fluid is the main factor affecting the resonant frequency of micro-cantilever， is further verified by the finite element method and experimental method.
%K 非黏性流体
%K ANSYS
%K 模态分析
%K 共振频率
%K 动态特性&lt
%K /br&gt
%K Key words： inviscid fluid ANSYS modal analysis resonance frequency dynamic properties
%U http://xuebao.neu.edu.cn/natural/CN/abstract/abstract10679.shtml