%0 Journal Article %T Measuring Method of Radius of Curvature Based on Dual-Frequency Laser Interferometer %A Wenlong Zhang %A Liang Miao %A Yu Liu %J Optics and Photonics Journal %P 209-214 %@ 2160-889X %D 2016 %I Scientific Research Publishing %R 10.4236/opj.2016.68B035 %X
In order to achieve high-accuracy measurement of radius of curvature of optical sphere, ultra-high accuracy radius of curvature testing device is developed by dual-frequency laser interferometer and Fizeau interferometer based on cat¡¯s eye and confocal method. Through analyzing the error source models of radius of curvature testing, optical configuration of the testing device has been optimized. Precise environment control and real-time monitoring system is also established to reduce the errors caused by environment. Through the above processes, the radius of curvature measurement relative accuracy is better than 2 ppm. One optical sphere, R88.5 mm, test aperture 59 mm, has been tested. Testing result is 88499.465 ¡À 0.176 ¦Ìm, meeting the design requirement. The method has high accuracy and practical advantages.
%K Radius of Curvature %K Cat¡¯s Eye and Confocal Method %K Dual-Frequency Laser Interferometer %U http://www.scirp.org/journal/PaperInformation.aspx?PaperID=70331