%0 Journal Article
%T Terahertz Metamaterial-Based  Microbolometers Fabricated  by Conventional MEMS
%A Tianhong Ao
%A Xiangdong Xu
%A Yu Gu
%A Zhegeng Chen
%A Yadong Jiang
%A Xinrong Li
%A Yuxiang Lian
%A Fu Wang
%A Qiong He
%J Optics and Photonics Journal
%P 215-218
%@ 2160-889X
%D 2016
%I Scientific Research Publishing
%R 10.4236/opj.2016.68B036
%X <div style=\"text-align:justify;\">
	<span style=\"line-height:1.5;\">37 ¦Ìm ¡Á 37 ¦Ìm array of metamaterial-based microbolometers was designed and successfully fa-bricated by conventional MEMS technology. FTIR measurements reveal that the as-designed mi-crobolometers exhibit a high absorption of ~31.5% at 3.93 THz. In contrast, no response can be detected from those microbolometers without metamaterials. The experimental results have been confirmed by simulations.</span>
</div>
%K Metamaterial
%K Absorber
%K MEMS
%K THz
%U http://www.scirp.org/journal/PaperInformation.aspx?PaperID=70332