%0 Journal Article
%T Approaches for Detailed Modelling of  Ultra-Precision Positioning Systems
%A Dominik Dahlmann
%A Nesrine Sassi
%A Berend Denkena
%J Modern Mechanical Engineering
%P 44-50
%@ 2164-0181
%D 2016
%I Scientific Research Publishing
%R 10.4236/mme.2016.61005
%X Nowadays, the productivity of ultra-precision machining is fundamentally limited by low feed rates because of the required accuracies in the nanometre range. An increase in motion dynamics leads to disturbances that affect the toolpath¡¯s accuracy. Existing control concepts are not able to reliably detect and compensate the deviations caused by increased dynamics. This paper compares modelling approaches for ultra-precision positioning systems aiming to predict and compensate occurring deviations.
%K Ultra-Precision
%K Modelling
%K Compensation
%U http://www.scirp.org/journal/PaperInformation.aspx?PaperID=64034