%0 Journal Article
%T 单层和多层Ehrlich-Schwoebel势垒对薄膜粗糙度随温度变化的影响<br>Effects of Ehrlich-Schwoebel Barrier on Thin Film Roughness Variation with Temperature
%A 崔婧
%A 唐吉玉
%A 伍达将
%A 刘洋
%A 朱永安   &lt
%A br&gt
%A Cui Jing
%A Tang Jiyu
%A Wu Dajiang
%A Liu Yang
%A Zhu Yongan
%J 华南师范大学学报（自然科学版）
%D 2015
%R 10.6054/j.jscnun.2015.03.010
%X 以Cu为原型，利用动力学蒙特卡洛(KMC)方法模拟了在一定的沉积速率下，单层、多层台阶Ehrlich-Schwoebel(ES)势及温度对成膜质量的影响.结果表明，在一定沉积速率和ES势垒下，薄膜的粗糙度在一定范围内随着温度的升高而降低，当多层ES势垒大于单层ES势垒时，此温度范围受单层ES势垒的影响，而与多层ES势垒关系不大；当单层ES势垒大于多层ES势垒时，多层ES势垒与粗糙度下降的起始温度密切相关，单层ES势垒与粗糙度趋于平稳的温度相关.<br>： The variations of thin film qualities under different ES barriers and temperatures are simulated through Kinetic Monte Carlo method taking Cu as a prototype. It comes to the conclusion that in conditions of fixed deposition rate and ES barrier, in certain temperature range, the roughness of thin film would vary dramatically. When multi-layer ES barrier is no less than mono-layer ES barrier, the temperature range is determined by mono-layer ES barrier and the variation of multi-layer ES barrier has little influence to the range. When multi-layer ES barrier is no more than mono-layer ES barrier, multi-layer ES barrier determines the beginning point of the temperature range and mono-layer ES barrier controls the ending point
%K KMC方法
%K 单层ES势垒
%K 多层ES势垒
%K 生长温度
%K 粗糙度
%K &lt
%K br&gt
%K Kinetic Monte Carlo method
%K mono-layer Ehrlich-Schwoebel barrier
%K multi-layer Ehrlich-Schwoebel barrier
%K temperature
%K roughness
%U http://journal.scnu.edu.cn:8080/jwk_xbzrb/CN/abstract/abstract3697.shtml