%0 Journal Article %T Low-background temperature sensors fabricated on parylene substrates %A A. Dhar %A J. C. Loach %A P. J. Barton %A J. T. Larsen %A A. W. P. Poon %J Physics %D 2015 %I arXiv %R 10.1088/1748-0221/10/12/P12002 %X Temperature sensors fabricated from ultra-low radioactivity materials have been developed for low-background experiments searching for neutrinoless double-beta decay and the interactions of WIMP dark matter. The sensors consist of electrical traces photolithographically-patterned onto substrates of vapor-deposited parylene. They are demonstrated to function as expected, to do so reliably and robustly, and to be highly radio-pure. This work is a proof-of-concept study of a technology that can be applied to broad class of electronic circuits used in low-background experiments. %U http://arxiv.org/abs/1508.05757v2