%0 Journal Article %T Towards wafer scale inductive characterization of spin transfer torque critical current density of magnetic tunnel junction stacks %A Sibylle Sievers %A Niklas Liebing %A Santiago Serrano-Guisan %A Ricardo Ferreira %A Elvira Paz %A Ambra Caprile %A Alessandra Manzin %A Massimo Pasquale %A Witold Skowro¨½ski %A Tomasz Stobiecki %A Karsten Rott %A G¨¹nter Reiss %A J¨¹rgen Langer %A Berthold Ocker %A Hans Werner Schumacher %J Physics %D 2014 %I arXiv %X We explore the prospects of wafer scale inductive probing of the critical current density $j^{c0}$ for spin transfer torque switching of a CoFeB/MgO/CoFeB magnetic tunnel junction with varying MgO thickness. From inductive measurements magnetostatic parameters and the effective damping are derived and $j^{c0}$ is calculated based on spin transfer torque equations. The inductive values compare well to the values derived from current induced switching measurements on individual nanopillars. Using a wafer scale inductive probe head could in the future enable wafer probe station based metrology of $j^{c0}$. %U http://arxiv.org/abs/1411.4868v1