%0 Journal Article
%T Computerized Langmuir Probe Measurements in a Capacitively Coupled RF Discharge
%A M. El Shaer
%A A. S. Mohamed
%A A. Massoud
%A M. Mobasher
%A M. Wuttmann
%J Physics
%D 2014
%I arXiv
%X A system of automated computerized Langmuir probe measurements is used in order to determine the plasma parameters in a plasma reactor constructed for cleaning of metallic artifacts by RF discharge. A compensated probe insures the suppression of the RF interference. The probe data are collected using a commercial data acquisition unit connected to a portable computer. The raw data are processed using wavelet transforms techniques which assures the de-noising of the probe signal without distortion of the probe I-V characteristic. The first and second derivatives of the I-V characteristic are determined. The measurement of the electron density spatial distribution in the inter-electrode distance indicates a flat density profile in the middle region of the discharge.
%U http://arxiv.org/abs/1406.5632v1