%0 Journal Article
%T Monitoring the formation of oxide apertures in micropillar cavities
%A Morten P. Bakker
%A Henk Snijders
%A Donald J. Suntrup III
%A Tuan-Ahn Truong
%A Pierre M. Petroff
%A Martin P. van Exter
%A Dirk Bouwmeester
%J Physics
%D 2013
%I arXiv
%R 10.1063/1.4795329
%X An imaging technique is presented that enables monitoring of the wet thermal oxidation of a thin AlAs layer embedded between two distributed Bragg reflector (DBR) mirrors in a micropillar. After oxidation we confirm by white light reflection spectroscopy that high quality optical modes confined to a small volume have been formed. The combination of these two optical techniques provides a reliable and efficient way of producing oxide apertured micropillar cavities for which the wet thermal oxidation is a critical fabrication step.
%U http://arxiv.org/abs/1301.6248v2