%0 Journal Article %T Convergent beam electron-diffraction investigation of lattice mismatch and static disorder in GaAs/GaAs1-xNx intercalated GaAs/GaAs1-xNx:H heterostructures %A Stefano Frabboni %A Vincenzo Grillo %A Gian Carlo Gazzadi %A Roberto Balboni %A Rinaldo Trotta %A Antonio Polimeni %A Mario Capizzi %A Faustino Martelli %A Silvia Rubini %A Giulio Guzzinati %A Frank Glas %J Physics %D 2014 %I arXiv %R 10.1063/1.4752464 %X Hydrogen incorporation in diluted nitride semiconductors dramatically modifies the electronic and structural properties of the crystal through the creation of nitrogen-hydrogen complexes. We report a convergent beam electron-diffraction characterization of diluted nitride semiconductor-heterostructures patterned at a sub-micron scale and selectively exposed to hydrogen. We present a method to determine separately perpendicular mismatch and static disorder in pristine and hydrogenated heterostructures. The roles of chemical composition and strain on static disorder have been separately assessed. %U http://arxiv.org/abs/1410.2436v1