%0 Journal Article
%T Fabrication of two-dimensional periodic TiO2 pillar arrays by multi-beam laser interference lithography
%A Hiroyo Segawa
%A Hiroaki Misawa
%J Natural Science
%P 176-180
%@ 2150-4105
%D 2009
%I Scientific Research Publishing
%R 10.4236/ns.2009.13022
%X Two-dimensional (2D) periodic TiO2 pillar arrays, applicable to photonic crystals and micro-channels, were fabricated by direct patterning of a TiO2-organic hybrid material by multi-beam laser interference lithography and calcination of hybrid patterns. 2D periodic pillars of a TiO2¨C organic hybrid material were prepared by irra-diation with the interference pattern of femto-second laser beams and removal of the non- irradiated portions. Two types of periodic pillar arrays, standing pillars and top-gathering pillars (four pillars gathered at the top), were obtained, depending on laser irradiation conditions. After calcination of TiO2¨Corganic hybrid pillars, TiO2 pillar arrays were obtained without collapse.
%K Lithography
%K Capillary Force
%K Assembly
%U http://www.scirp.org/journal/PaperInformation.aspx?PaperID=1005