%0 Journal Article
%T Determination of N and O-Atoms, of N<sub>2</sub>(A) and N<sub>2</sub>(X, v > 13) Metastable Molecules and N<sub>2</sub><sup style="margin-left:-6px;">+</sup> Ion Densities in the Afterglows of Ar-N<sub>2</sub> Microwave Discharges
%A Andre Ricard
%A Hayat Zerrouki
%A Jean-Philippe Sarrette
%J Journal of Analytical Sciences, Methods and Instrumentation
%P 59-65
%@ 2164-2753
%D 2015
%I Scientific Research Publishing
%R 10.4236/jasmi.2015.54007
%X Early afterglows of Ar-N2 flowing microwave discharges are characterized by optical emission spectroscopy. The N and O atoms, the N2(A) and N2(X, v > 13) metastable molecules and N2+ ion densities are determined by optical emission spectroscopy after calibration by NO titration for N and O-atoms and measurements of NO and N2 band intensities. For an Ar-xN2 gas mixture with กม increasing from 2 to 100% at 4 Torr, 100 Watt and an afterglow time of 3 กม 10- 3 s at the 5 liter reactor inlet, it is found densities in the ranges of (2 - 6) กม 1014 cm- 3 for N-atoms, one order of magnitude lower for N2(X, v > 13) and for O-atoms (coming from air impurity), of 1010 - 1011 cm- 3 for N2(A) and of 108 - 109 cm- 3 for N2+.
%K Ar-N<
%K sub>
%K 2<
%K /sub>
%K Microwave Discharge
%K Flowing Afterglow
%K N-Atoms
%K N<
%K sub>
%K 2<
%K /sub>
%K Metastables
%K N<
%K sub>
%K 2<
%K /sub>
%K <
%K sup style="
%K margin-left:-6px
%K "
%K >
%K +<
%K /sup>
%K Ions
%U http://www.scirp.org/journal/PaperInformation.aspx?PaperID=61968