%0 Journal Article
%T Ethanol Microsensors with a Readout Circuit Manufactured Using the CMOS-MEMS Technique
%A Ming-Zhi Yang
%A Ching-Liang Dai
%J Sensors
%P 1623-1634
%D 2015
%I MDPI AG
%R 10.3390/s150101623
%X The design and fabrication of an ethanol microsensor integrated with a readout circuit on-a-chip using the complementary metal oxide semiconductor (CMOS)-microelectro -mechanical system (MEMS) technique are investigated. The ethanol sensor is made up of a heater, a sensitive film and interdigitated electrodes. The sensitive film is tin dioxide that is prepared by the sol-gel method. The heater is located under the interdigitated electrodes, and the sensitive film is coated on the interdigitated electrodes. The sensitive film needs a working temperature of 220 ˇăC. The heater is employed to provide the working temperature of sensitive film. The sensor generates a change in capacitance when the sensitive film senses ethanol gas. A readout circuit is used to convert the capacitance variation of the sensor into the output frequency. Experiments show that the sensitivity of the ethanol sensor is 0.9 MHz/ppm.
%K ethanol sensor
%K tin dioxide film
%K heater
%K CMOS-MEMS
%U http://www.mdpi.com/1424-8220/15/1/1623