%0 Journal Article
%T A Study of Design Optimization Using  Response Surface Analysis and Fabricaiton MEMS Probe Tip
%A K. B. Kim
%A J. W. Lee
%A S. J. Ha
%A Y. K. Cho
%A M. W. Cho
%J Journal of Applied Mathematics and Physics
%P 201-207
%@ 2327-4379
%D 2015
%I Scientific Research Publishing
%R 10.4236/jamp.2015.32030
%X <p class=\"MsoNormal\">
	<span lang=\"EN-US\">In semiconductor manufacturing process, probe
station that is testing equipment is important. Inspection step is for detecting
defects on semiconductor before the packaging. Probe card is a part of probe
station and contains probe tip that contacts to semiconductor. Through probe
tip, it can inspect defects of semiconductor. In this paper, </span><span lang=\"EN-US\">optimization method
is used with response surface analysis</span><span lang=\"EN-US\"> to design MEMS type probe tip.
And fabricating probe tip uses maskless lithography, electro-plating and
lapping process.</span>
</p>
%K A Study of Design Optimization Using  Response Surface Analysis and Fabricaiton MEMS Probe Tip
%U http://www.scirp.org/journal/PaperInformation.aspx?PaperID=53680