%0 Journal Article
%T An Ultra-High Element Density pMUT Array with Low Crosstalk for 3-D Medical Imaging
%A Yi Yang
%A He Tian
%A Yu-Feng Wang
%A Yi Shu
%A Chang-Jian Zhou
%A Hui Sun
%A Cang-Hai Zhang
%A Hao Chen
%A Tian-Ling Ren
%J Sensors
%D 2013
%I MDPI AG
%R 10.3390/s130809624
%X A ~1 MHz piezoelectric micromachined ultrasonic transducer (pMUT) array with ultra-high element density and low crosstalk is proposed for the first time. This novel pMUT array is based on a nano-layer spin-coating lead zirconium titanium film technique and can be fabricated with high element density using a relatively simple process. Accordingly, key fabrication processes such as thick piezoelectric film deposition, low-stress Si-SOI bonding and bulk silicon removal have been successfully developed. The novel fine-pitch 6 ¡Á 6 pMUT arrays can all work at the desired frequency (~1 MHz) with good uniformity, high performance and potential IC integration compatibility. The minimum interspace is ~20 ¦Ìm, the smallest that has ever been achieved to the best of our knowledge. These arrays can be potentially used to steer ultrasound beams and implement high quality 3-D medical imaging applications.
%K piezoelectric
%K ultrasonic transducer
%K Si-SOI bonding
%K IC integration compatibility
%K 3-D medical imaging
%U http://www.mdpi.com/1424-8220/13/8/9624