%0 Journal Article
%T Analysis and Design of a 3rd Order Velocity-Controlled Closed-Loop for MEMS Vibratory Gyroscopes
%A Huan-ming Wu
%A Hai-gang Yang
%A Tao Yin
%A Ji-wei Jiao
%J Sensors
%D 2013
%I MDPI AG
%R 10.3390/s130912564
%X The time-average method currently available is limited to analyzing the specific performance of the automatic gain control-proportional and integral (AGC-PI) based velocity-controlled closed-loop in a micro-electro-mechanical systems (MEMS) vibratory gyroscope, since it is hard to solve nonlinear functions in the time domain when the control loop reaches to 3rd order. In this paper, we propose a linearization design approach to overcome this limitation by establishing a 3rd order linear model of the control loop and transferring the analysis to the frequency domain. Order reduction is applied on the built linear model¡¯s transfer function by constructing a zero-pole doublet, and therefore mathematical expression of each control loop¡¯s performance specification is obtained. Then an optimization methodology is summarized, which reveals that a robust, stable and swift control loop can be achieved by carefully selecting the system parameters following a priority order. Closed-loop drive circuits are designed and implemented using 0.35 ¦Ìm complementary metal oxide semiconductor (CMOS) process, and experiments carried out on a gyroscope prototype verify the optimization methodology that an optimized stability of the control loop can be achieved by constructing the zero-pole doublet, and disturbance rejection capability (D.R.C) of the control loop can be improved by increasing the integral term.
%K MEMS vibratory gyroscopes
%K velocity-controlled closed-loop
%K 3rd order
%K linear model
%K optimization methodology
%U http://www.mdpi.com/1424-8220/13/9/12564