%0 Journal Article
%T Effect of Embedded Pd Microstructures on the Flat-Band-Voltage Operation of Room Temperature ZnO-Based Liquid Petroleum Gas Sensors
%A Ghusoon M. Ali
%A Cody V. Thompson
%A Ali K. Jasim
%A Isam M. Abdulbaqi
%A James C. Moore
%J Sensors
%D 2013
%I MDPI AG
%R 10.3390/s131216801
%X Three methods were used to fabricate ZnO-based room temperature liquid petroleum gas (LPG) sensors having interdigitated metal-semiconductor-metal (MSM) structures. Specifically, devices with Pd Schottky contacts were fabricated with: (1) un-doped ZnO active layers; (2) Pd-doped ZnO active layers; and (3) un-doped ZnO layers on top of Pd microstructure arrays. All ZnO films were grown on p-type Si(111) substrates by the sol-gel method. For devices incorporating a microstructure array, Pd islands were first grown on the substrate by thermal evaporation using a 100 ¦Ìm mesh shadow mask. We have estimated the sensitivity of the sensors for applied voltage from
%K zinc oxide
%K ZnO
%K interdigitated
%K liquid petroleum gas
%K LPG
%K sol-gel
%K metal-semiconductor-metal
%K gas sensor
%K palladium
%K Pd
%U http://www.mdpi.com/1424-8220/13/12/16801