%0 Journal Article
%T Design and Analysis of Wideband Ladder-Type Film Bulk Acoustic Wave Resonator Filters in Ku-Band
%A N. Izza M. Nor
%A K. Shah
%A J. Singh
%A Z. Sauli
%J Active and Passive Electronic Components
%D 2013
%I Hindawi Publishing Corporation
%R 10.1155/2013/403516
%X This paper presents the design of ladder-type filters based on film bulk acoustic wave resonator (FBAR) in Ku-band. The proposed FBAR filter has an insertion loss of £¿3£¿dB, out-of-band rejection of £¿12£¿dB and 3£¿dB bandwidth of 1.0£¿GHz from 15£¿GHz to 16£¿GHz. Based on the characteristics of the FBAR filter, the expected characteristics of FBAR resonators are determined by using the 1D numerical analysis. This design proves that it is possible to design a wide-bandwidth FBAR filter in Ku-band. 1. Introduction Transceiver systems working in Ku-band frequency range of 12¨C18£¿GHz are primarily used for satellite communications and radars. Cost, area, and power consumption are the key figures of merit for such transceiver system. However, the literature shows that most of these transceivers are designed using low-temperature cofire ceramic (LTCC) technology and are relatively large in size and heavy due to the use of discrete components such as filter and separately located modules. The multilayer LTCC and the systems-on-package (SOP) implementations are capable of overcoming these issues by integrating active and passive components on one board. Various Ku-band filters have been reported in the literature using different designs and manufacturing methods such as defect ground structure (DGS), interdigital structure, coupled line filters, and couple strip line filters have been integrated using LTCC technology [1¨C3]. However, improvement in filter performance and better integration methods with microwave monolithic integrated circuit (MMIC) and radio frequency (RF) microelectromechanical systems (MEMS) technology as used in WiFi and WiMAX applications [4] can be used to improve integration and reduce power consumption. Film bulk acoustic wave resonator (FBAR) filter and FBAR diplexer designed using RF MEMS technology have been developed for WiFi and WiMAX applications [4]. Such MEMS components have shown better performance and higher integration level which can also be achieved in Ku-band transceivers using MEMS-based FBAR filters. Thin membrane-type resonator and solidly mounted resonator (SMR) are two types of FBARs based on acoustical isolation from the substrate [5]. Acoustical isolation achieved by air-gap is the preferred method to achieve high-quality ( ) factor using simpler fabrication methods [6]. The literature shows that AlN is the preferred material due to its moderate mechanical coupling factor, higher acoustic velocity, and higher value [7] at operating frequencies higher than 10£¿GHz. Surface acoustic wave (SAW) resonators whose resonance
%U http://www.hindawi.com/journals/apec/2013/403516/