%0 Journal Article
%T Cryogenic thermal storage system for discontinuous industrial vacuum processes
%A Bruzzi M.
%A Chesi A.
%A Baldi A.
%A Tarani F.
%J EPJ Web of Conferences
%D 2012
%I 
%R 10.1051/epjconf/20123304006
%X Phase Change Materials are proposed for refrigerating systems in discontinuous industrial vacuum processes where temperatures as low as  140 ¡Â  100¡ãC are necessary within time-frames representing 10¡Â20% of total operating time. An application is proposed for cooling systems used in a Physical Vapour Deposition (PVD) apparatus. A prototype has been manufactured which couples a cryopump with a reservoir filled with MethylCycloPentane (MCP-C6H12) and a distribution line where nitrogen in the gaseous state is flowing. Preliminary tests show that temperatures of about  120¡ãC are actually achieved within time windows compatible with PVD applications.
%U http://dx.doi.org/10.1051/epjconf/20123304006