%0 Journal Article
%T Transformations in Submonolayer Coverages of Chromium and Titanium on Si (001) Surface
%A K.O.£¿Butariev
%A I.F.£¿Koval
%A Yu.A.£¿Len
%A M.G.£¿Nakhodkin
%J Journal of Nano- and Electronic Physics
%D 2013
%I Sumy State University
%X In this article the structure Si (001) surface covered by the pre-adsorbed (~ 1-3 nm) of Ti and Cr at room temperature after annealing at 450 ¡ãC was studied. It was found that after annealing on silicon surface formed island coverage. The investigation of stoichiometry shows that island¡¯s composed of disilicide structure.
%K Transition metal
%K Silicide
%K Oxidation
%K Silico
%U http://jnep.sumdu.edu.ua/download/numbers/2013/1/articles/jnep_2013_V5_01025.pdf