%0 Journal Article
%T Study of High Quality Indium Nitride Films Grown on Si(100) Substrate by RF-MOMBE with GZO and AlN Buffer Layers
%A Wei-Chun Chen
%A Shou-Yi Kuo
%J Journal of Nanomaterials
%D 2012
%I Hindawi Publishing Corporation
%R 10.1155/2012/853021
%U http://dx.doi.org/10.1155/2012/853021