%0 Journal Article %T The Effect of Device Geometry on the Performance of the ZnO MSM Photodetectors %A Ahmed M. Nahhas %J Elektrika : Journal of Electrical Engineering %D 2008 %I %X In this paper, we present our study of the device geometry's effect on the performance of the ZnO MSM-PD. Thedevice geometry has a direct effect on the performance of the ZnO MSM-PD, specially, the speed of lightĄ¯s detection.Several device geometry parameters of the ZnO MSM-PD were studied and analyzed. The performance of the ZnO MSMPDwas evaluated and determined based on different criteria: capacitance per unit area, carrierĄ¯s transit time, externalquantum efficiency, dark current, and photocurrent. These criteria were studied and analyzed using experimental methods inorder to achieve the optimum device geometric parameters for the ZnO MSM-PD. %K CarrierĄ¯s transit time %K Dark current %K MSM-PD %K Photocurrent %K ZnO %U http://www.fke.utm.my/elektrika/june08/paper1june08.pdf