%0 Journal Article
%T Manufacturing and Analysis of Low-loss Ion-exchanged Glass-based Waveguide
%A HAO Yin-Lei
%A ZHENG Wei-Wei
%A JIANG Shu-Hang
%A GU Jin-Hui
%A SUN Yi-Ling
%A YANG Jian-Yi
%A LI Xi-Hua
%A ZHOU Qiang
%A JIANG Xiao-Qing
%A WANG Ming-Hua
%J 无机材料学报
%D 2009
%I Science Press
%R 10.3724/sp.j.1077.2009.01041
%X Silicate glass of system SiO2-B2O3-Al2O3-R ˉO-R2O￡¨R ˉ=Ca, Mg; R=Na, K￡ was designed and melted for ion-exchanged integrated optical waveguide chip, on consideration of the suitability of ion-exchange and ion-diffusion process on this glass substrate, buried channel waveguide was manufactured by Ag+/Na+ ion-exchange in mixed melted salts, and subsequently field-assisted ion-diffusion process. Observation of optical microscope and electron microprobe show that Ag+ diffusion zone is driven to approximately 10|  under the glass substrate surface. The Ag+ diffusion zone possesses higher refractive index than glass substrate, and thus acts as the waveguide core. This waveguide core is typically in dimension of 8|   | , matching well with that of single-mode-fiber core, which ensures a low coupling loss. Propagation loss and coupling loss with single-mode-fiber is measured to be 0.1dB/cm and 0.2-0.3dB/facet respectively, at the wavelength of 1.55| . The propagation loss is very close to glass material inhere loss at the same wavelength, a typical characteristics of buried waveguide. It shows that the waveguide manufacturing process is promising for implementation of low-loss integrated optical devices.
%K ion-exchange
%K glass
%K optical waveguide
%U http://www.jim.org.cn/fileup/PDF/20090533.pdf