%0 Journal Article
%T Effect of Hydrogen Content and Bonding Environment on Mechanical Properties of Hydrogenated Silicon Films Deposited by High-Frequency PECVD Process
%A Jhuma Gope
%A Sushil Kumar
%A A. Parashar
%A S. Dayal
%J ISRN Nanomaterials
%D 2012
%I Hindawi Publishing Corporation
%R 10.5402/2012/429348
%U http://dx.doi.org/10.5402/2012/429348