%0 Journal Article %T Thermodynamics and Oxidation Behaviour of Crystalline Silicon Carbide (3C) with Atomic Oxygen and Ozone %A Chandrika Varadachari %A Ritabrata Bhowmick %A Kunal Ghosh %J ISRN Thermodynamics %D 2012 %I Hindawi Publishing Corporation %R 10.5402/2012/108781 %U http://dx.doi.org/10.5402/2012/108781