%0 Journal Article
%T Micro-Optoelectromechanical Tilt Sensor
%A Timothy G. Constandinou
%A Julius Georgiou
%J Journal of Sensors
%D 2008
%I Hindawi Publishing Corporation
%R 10.1155/2008/782764
%X This paper presents a novel hybrid CMOS/MEMS tilt sensor with a 5กใ resolution over a 300กใ range. The device uses a MEMS-based semicircular mass suspended from a rigid body, projecting a shadow onto the CMOS-based optical sensor surface. A one-dimensional photodiode array arranged as a uniformly segmented ring is then used to determine the tilt angle by detecting the position of the semicircular mass. The complete sensor occupies an area of under 2.5 mm กม 2.5 mm.
%U http://www.hindawi.com/journals/js/2008/782764/