%0 Journal Article
%T Fabrication of Biochips with Micro Fluidic Channels by Micro End-milling and Powder Blasting
%A Dae Jin Yun
%A Tae Il Seo
%A Dong Sam Park
%J Sensors
%D 2008
%I MDPI AG
%X For microfabrications of biochips with micro fluidic channels, a large number of microfabrication techniques based on silicon or glass-based Micro-Electro-Mechanical System (MEMS) technologies were proposed in the last decade. In recent years, for low cost and mass production, polymer-based microfabrication techniques by microinjection molding and micro hot embossing have been proposed. These techniques, which require a proper photoresist, mask, UV light exposure, developing, and electroplating as a preprocess, are considered to have some problems. In this study, we propose a new microfabrication technology which consists of micro end-milling and powder blasting. This technique could be directly applied to fabricate the metal mold without any preprocesses. The metal mold with micro-channels is machined by micro end-milling, and then, burrs generated in the end-milling process are removed by powder blasting. From the experimental results, micro end-milling combined with powder blasting could be applied effectively for fabrication of the injection mold of biochips with micro fluidic channels.
%K Biochip
%K Micro Fluidic Channel
%K Powder Blasting
%K Micro End-milling
%U http://www.mdpi.com/1424-8220/8/2/1308/