%0 Journal Article
%T A Zirconium Dioxide Ammonia Microsensor Integrated with a Readout Circuit Manufactured Using the 0.18 ¦Ìm CMOS Process
%A Guan-Ming Lin
%A Ching-Liang Dai
%A Ming-Zhi Yang
%J Sensors
%D 2013
%I MDPI AG
%R 10.3390/s130303664
%X The study presents an ammonia microsensor integrated with a readout circuit on-a-chip fabricated using the commercial 0.18 ¦Ìm complementary metal oxide semiconductor (CMOS) process. The integrated sensor chip consists of a heater, an ammonia sensor and a readout circuit. The ammonia sensor is constructed by a sensitive film and the interdigitated electrodes. The sensitive film is zirconium dioxide that is coated on the interdigitated electrodes. The heater is used to provide a working temperature to the sensitive film. A post-process is employed to remove the sacrificial layer and to coat zirconium dioxide on the sensor. When the sensitive film adsorbs or desorbs ammonia gas, the sensor produces a change in resistance. The readout circuit converts the resistance variation of the sensor into the output voltage. The experiments show that the integrated ammonia sensor has a sensitivity of 4.1 mV/ppm.
%K integrtaed ammonia microsensor
%K zirconium dioxide
%K readout circuit
%K CMOS
%U http://www.mdpi.com/1424-8220/13/3/3664