%0 Journal Article %T Patterning titania with the conventional and modified micromolding in capillaries technique from sol¨Cgel and dispersion solutions %A Sajid Ullah Khan and Johan E ten Elshof %J Science and Technology of Advanced Materials %D 2012 %I Institute of Physics, National Institute for Materials Science %X We report TiO2 patterns obtained by a soft-lithographic technique called 'micromolding in capillaries' using sol¨Cgel and dispersion solutions. A comparison between patterning with a sol¨Cgel and dispersion solutions has been performed. The patterns obtained from sol¨Cgel solutions showed good adhesion to the substrate and uniform shapes, but large shrinkage, whereas those obtained from dispersion solution had high solid content, but exhibited poor adhesion and non-uniform shapes. A fabrication method of a layer-by-layer structured pattern is also demonstrated. This type of pattern may find application in sensors, waveguides and other photonics elements. The occurrence of an undesirable residue layer, which hinders the fabrication of isolated patterns, is highlighted and a method of prevention is suggested. %U http://iopscience.iop.org/1468-6996/13/2/025002