%0 Journal Article
%T Micro-lens Array Fabrication by Two Photon Polymerization Technology
%A Tien-Tung Chung
%A Yi-Ting Tu
%A Ya-Hsun Hsueh
%A Sheng-Yuan Chen
%A Wan-Jou Li
%J International Journal of Automation and Smart Technology
%D 2013
%I Chinese Institute of Automation Engineers, Taiwan Smart Living Space Association
%R 10.5875/ausmt.v3i2.186
%X This paper presents the design and fabrication of micro-lens arrays (MLAs) by Two Photon Polymerization (TPP) technology. First, a computer program is developed to construct a solid MLA model with a specified focal length and lens diameter. A TPP laser scanning path for MLA fabrication is then generated. MLAs are fabricated by TPP, with quality assessed by SEM. Finally, good quality 5 กม 5 MLA squares with dimensions 108 กม 108 are successfully manufactured.
%K Micro-lens array
%K Two photon polymerization
%K Vertical slicing method
%U http://www.ausmt.org/index.php/AUSMT/article/view/186/195