%0 Journal Article
%T Nanoindentation of high-aspect ratio pillar structures on optical multilayer dielectric diffraction gratings
%A K. Mehrotra
%A H. P. Howard
%A S. D. Jacobs
%A J. C. Lambropoulos
%J AIP Advances
%D 2011
%I AIP Publishing LLC
%R 10.1063/1.3673070
%X The mechanical response of optical multilayer dielectric (MLD) diffraction gratings has been studied using nanoindentation. The results are interpreted using a stress-strain model, which reveals a uniaxial yield stress of 4.1 GPa. It is shown that the indentation response of the high-aspect ratio ¡°pillar¡± geometry (constrained in one transverse direction but free in the other) can be expressed in terms of yield stress rather than material hardness.
%U http://link.aip.org/link/doi/10.1063/1.3673070