%0 Journal Article
%T Advanced Ion and Plasma Sources for Materials Surface Engineering
%A Petrov A.
%A Alexandrov A.
%A Kralkina E.
%A Nekliudova P.
%J Proceedings of the International Conference Nanomaterials : Applications and Properties
%D 2012
%I Sumy State University
%X The paper presents the results of the authors many year work in the field of ion and plasma sources development. The families of DC and RF ion and plasma sources are described. The results of ion and plasma sources utilization in materials surface modification technologies are discussed.
%K Surface engineering
%K Plasma technologies
%K Ion technologies
%K Advanced plasma and ion sources
%K Plasma-surface interaction
%U http://nap.sumdu.edu.ua/index.php/nap/nap2012/paper/view/687