%0 Journal Article
%T Electrophysical Properties of Nanodimentional Pt Thin Films
%A Pazukha I.M.
%A Protsenko I.Yu.
%A Tyschenko K.V.
%A Shumakova N.I.
%J Proceedings of the International Conference Nanomaterials : Applications and Properties
%D 2012
%I Sumy State University
%X The results of research structural and phase state, electrophysical properties (resistivity, temperature coefficient of resistance (TCR), strain gauge) of Pt thin films in the range of thicknesses from 7 to 50 nm were presented. Thin films Pt have fcc structure with lattice parameter = 0,390 nm after annealing. The temperature dependences characterized by relative large value of resistivity (¦Ñ ~ 10-6 Ohm m) and relative small value of TCR (¦Â ~10-4 K-1) respectively. Strain properties characterized by a wide interval of elastic deformation (more than 1%), relatively low value of gauge factor (1,5-3 units).
%K Thin-film synthesis
%K Thin-film properties
%K Nanothickness
%K Nanostructured matter
%U http://nap.sumdu.edu.ua/index.php/nap/nap2012/paper/view/501