%0 Journal Article %T Silicon high-voltage unpackaged switching microwave p每i每n-diodes with a breakdown voltage up to 2000 V %A Krivutsa V. A. %A Basanets V. V. %A Boltovets M. S. %A Ivanov V. M. %J Tekhnika i Pribory SVCh %D 2010 %I %X Results of design, manufacturing and research of silicon unpackaged high-voltage microwave p每i每n-diodes are presented. Possibility to achieve the breakdown voltage up to 2000 V for the p每i每n-diodes with 200 microns base thickness and step type of i-zone lateral side is shown. %K p-i-n-diode %K mesostrukture %K stepped profile %K the breakdown voltage %K direct loss resistance %U http://www.tkea.com.ua/svc/2010/1_2010/pdf/04.zip