%0 Journal Article
%T Study of AZO Thin Films Under Different Ar Flow and Sputtering Power by rf Magnetron Sputtering
%A Hung-Wei Wu
%A Chien-Hsun Chu
%A Yu-Fu Chen
%A Yung-Wei Chen
%J Lecture Notes in Engineering and Computer Science
%D 2013
%I Newswood and International Association of Engineers
%U http://www.iaeng.org/publication/IMECS2013/IMECS2013_pp790-793.pdf