%0 Journal Article %T Spectroscopic studies of Er-doped Si-rich silicon oxide/SiO2 multilayers %A Fabrice GOURBILLEAU %A Christian DUFOUR %A Roger MADELON %A Richard RIZK %J Optica Applicata %D 2007 %I %X The effects of Si nanocluster (Si-nc) size and of the distance between Si-nc and Er ion on the photoluminescence of the Er3+ ions have been investigated by means of appropriate multilayer configurations fabricated by reactive magnetron sputtering. On the one hand, the effect of Si-nc size is studied in Er-Si-rich SiO2/SiO2 multilayers. The coupling between Si-nc and Er3+ ions is found to be less efficient when the Si-nc¡¯s reach a size of 5 nm and attributed to a loss of the quantum confinement of carriers. On the other hand, the interaction distance between Si-nc and Er ions is determined through the photoluminescence properties of Si-rich SiO2/Er-SiO2 multilayers. The characteristic interaction distance Si-nc-Er is dependent on the nature of the sensitizers with 0.4 ¡À 0.1 nm for amorphous Si and 2.6 ¡À 0.4 nm for Si nanocrystals. %K reactive magnetron sputtering %K multimayers %K erbium %K Si nanoclusters %K photoluminescence %K interaction distance %U http://www.if.pwr.wroc.pl/~optappl/pdf/2007/no12/optappl_3712p21.pdf