%0 Journal Article %T Quantitative multichannel NC-AFM data analysis of graphene growth on SiC(0001) %A Christian Held %A Thomas Seyller %A Roland Bennewitz %J Beilstein Journal of Nanotechnology %D 2012 %I %R 10.3762/bjnano.3.19 %X Noncontact atomic force microscopy provides access to several complementary signals, such as topography, damping, and contact potential. The traditional presentation of such data sets in adjacent figures or in colour-coded pseudo-three-dimensional plots gives only a qualitative impression. We introduce two-dimensional histograms for the representation of multichannel NC-AFM data sets in a quantitative fashion. Presentation and analysis are exemplified for topography and contact-potential data for graphene grown epitaxially on 6H-SiC(0001), as recorded by Kelvin probe force microscopy in ultrahigh vacuum. Sample preparations by thermal decomposition in ultrahigh vacuum and in an argon atmosphere are compared and the respective growth mechanisms discussed. %K FM-AFM %K graphene %K 6H-SiC(0001) %K KPFM %K SPM %U http://dx.doi.org/10.3762/bjnano.3.19