%0 Journal Article
%T High-Q Photonic Crystal Nanobeam Cavity Based on a Silicon Nitride Membrane Incorporating Fabrication Imperfections and a Low-Index Material Layer
%A Marco Grande
%A Giovanna Calo
%A Vincenzo Petruzzelli
%A Antonella D'Orazio
%J PIER    B
%D 2012
%I EMW Publishing
%R 10.2528/PIERB11101405
%X We detail the optimization of a nanobeam design and show how the fabrication imperfections can affect the optical performance of the device. Then we propose the design of a novel configuration of a photonic crystal nanobeam cavity consisting of a membrane structure obtained by sandwiching a layer of Flowable Oxide (FOx) between two layers of Silicon-Nitride (SiN). Finally, we demonstrate that the presence of a low refractive index layer does not impair the performance of the nanobeam cavity that still exhibits a factor and mode volume of the order of 10 and 0.02 (¦Ë/n)
%U http://www.jpier.org/pierb/pier.php?paper=11101405