%0 Journal Article
%T Novel Designs for Application Specific MEMS Pressure Sensors
%A Giulio Fragiacomo
%A Kasper Reck
%A Lasse Lorenzen
%A Erik V. Thomsen
%J Sensors
%D 2010
%I MDPI AG
%R 10.3390/s101109541
%X In the framework of developing innovative microfabricated pressure sensors, we present here three designs based on different readout principles, each one tailored for a specific application. A touch mode capacitive pressure sensor with high sensitivity (14 pF/bar), low temperature dependence and high capacitive output signal (more than 100 pF) is depicted. An optical pressure sensor intrinsically immune to electromagnetic interference, with large pressure range (0¨C350 bar) and a sensitivity of 1 pm/bar is presented. Finally, a resonating wireless pressure sensor power source free with a sensitivity of 650 KHz/mmHg is described. These sensors will be related with their applications in£¿ harsh environment, distributed systems and medical environment, respectively. For many aspects, commercially available sensors, which in vast majority are piezoresistive, are not suited for the applications proposed.
%K micromachined
%K pressure
%K capacitive
%K optical
%K wireless
%K silicon
%K MEMS
%K MOEMS
%U http://www.mdpi.com/1424-8220/10/11/9541